Why the semiconductor industry cannot do without heating and cooling circulator?

Why the semiconductor industry cannot do without heating and cooling circulator

The semiconductor industry cannot do without heating and cooling circulator, mainly for the following reasons:

Process requirements

Heat treatment process:

In the production process of semiconductor devices, heat treatment processes such as oxidation, diffusion, and ion implantation need to be carried out at specific temperatures. The high and low temperature integrated machine can provide precise temperature control to ensure the smooth progress of these processes, thereby ensuring the production quality of semiconductor devices.

Doping process:

Doping is a key step in changing the electrical properties of semiconductor materials by introducing specific impurities into them. The high and low temperature integrated machine can provide accurate temperature control for doping processes, enabling impurities to be evenly distributed in materials and achieving ideal doping effects.

Cleaning and etching process: When cleaning and etching semiconductor materials to remove surface contaminants and unwanted materials, the high-low temperature integrated machine can provide an appropriate temperature environment to improve the effectiveness of cleaning and etching.

Material research and preparation

The research and preparation of semiconductor materials require extremely high temperature control. The heating and cooling circulator can provide environments such as high temperature hot pressing and low temperature chambers, achieving precise control over the heat treatment, growth, and preparation processes of materials, thereby changing the crystal structure, physical properties, and chemical properties of materials, and optimizing and improving the performance of semiconductor materials.

Device testing and verification

Performance testing:

Semiconductor devices will face various temperature environments in practical applications. Heating and cooling circulator can simulate different temperature conditions such as high and low temperatures, test the devices, and detect whether their performance is stable at different temperatures, ensuring the reliability and stability of the devices in actual use.

Reliability verification:

In semiconductor wafer reliability testing, the heating and cooling circulator can simulate complex environmental temperature cycles, helping engineers detect and predict the performance degradation of chips during long-term use, and providing strong support for product reliability verification.

Advantages of temperature control

High precision and high stability:

The heating and cooling circulator has high-precision temperature control capability, which can achieve a temperature control accuracy of ±0.5°C, ensuring that the temperature fluctuation range of semiconductor devices in the production process is very small. At the same time, advanced refrigeration technology is adopted, which has high stability refrigeration capacity and can provide the required temperature environment stably for a long time.

Quick response:

It can quickly achieve temperature changes, meet the demand for rapid temperature switching in semiconductor manufacturing processes, and improve production efficiency.

Wide temperature range:

The heating and cooling circulator can accurately adjust the temperature within a range of -120℃ to 300℃ or even wider, covering the temperature range required for various processes and tests in the semiconductor industry.

Self protection function

The heating and cooling circulator has self-protection functions such as over temperature protection, over voltage protection, and leakage protection. When the equipment runs abnormally, such as when the temperature exceeds the set safe range or the power supply voltage is too high, the protection function will immediately activate to prevent thermal damage to semiconductor materials or equipment damage, ensuring the safety and continuity of production.